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United States Patent

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United States Patent 7,057,795
Hunter ,   et al. June 6, 2006
Micro-structures with individually addressable ribbon pairs


Abstract

An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.

Inventors: Hunter; Jim (Campbell, CA), Amm; David (Sunnyvale, CA), Gudeman; Christopher (Los Gatos, CA)
Assignee: Silicon Light Machines Corporation (Sunnyvale, CA)
Appl. No.: 10/225,370
Filed: August 20, 2002

Current U.S. Class: 359/291 ; 359/224; 359/237; 359/290; 359/295; 359/298; 359/572
Current International Class: G02B 26/00 (20060101); G02B 26/08 (20060101); G02B 5/18 (20060101)
Field of Search: 359/290,291,295,298,224,318,572,573,237,211,571 385/18

References Cited
U.S. Patent Documents
1525550 February 1925 Jenkins
1548262 August 1925 Freedman
RE16767 October 1927 Jenkins
1814701 July 1931 Ives
2415226 February 1947 Sziklai
2783406 February 1957 Vanderhooft
2920529 January 1960 Blythe
2991690 July 1961 Grey et al.
RE25169 May 1962 Glenn
3256465 June 1966 Weissenstern et al.
3388301 June 1968 James
3443871 May 1969 Chitayat
3553364 January 1971 Lee
3576394 April 1971 Lee
3600798 August 1971 Lee
3656837 April 1972 Sandbank
3657610 April 1972 Yamamoto et al.
3693239 September 1972 Dix
3743507 July 1973 Ih et al.
3752563 August 1973 Torok et al.
3781465 December 1973 Ernstoff et al.
3783184 January 1974 Ernstoff et al.
3792916 February 1974 Sarna
3802769 April 1974 Rotz et al.
3811186 May 1974 Larnerd et al.
3861784 January 1975 Torok
3862360 January 1975 Dill et al.
3871014 March 1975 King et al.
3886310 May 1975 Guldberg et al.
3896338 July 1975 Nathanson et al.
3915548 October 1975 Opittek
3935499 January 1976 Oess
3935500 January 1976 Oess et al.
3938881 February 1976 Biegelsen et al.
3941456 March 1976 Schilz et al.
3942245 March 1976 Jackson et al.
3943281 March 1976 Keller et al.
3947105 March 1976 Smith
3969611 July 1976 Fonteneau
3980476 September 1976 Wysocki
3991416 November 1976 Byles et al.
4001663 January 1977 Bray
4004849 January 1977 Shattuck
4006968 February 1977 Ernstoff et al.
4009939 March 1977 Okano
4011009 March 1977 Lama et al.
4012116 March 1977 Y vick
4012835 March 1977 Wallick
4017158 April 1977 Booth
4020381 April 1977 Oess et al.
4021766 May 1977 Aine
4034211 July 1977 Horst et al.
4034399 July 1977 Drukier et al.
4035068 July 1977 Rawson
4067129 January 1978 Abramson et al.
4084437 April 1978 Finnegan
4090219 May 1978 Ernstoff et al.
4093346 June 1978 Nishino et al.
4093921 June 1978 Buss
4093922 June 1978 Buss
4100579 July 1978 Ernstoff
4103273 July 1978 Keller
4126380 November 1978 Borm
4127322 November 1978 Jacobson et al.
4135502 January 1979 Peck
4139257 February 1979 Matsumoto
4143943 March 1979 Rawson
4163570 August 1979 Greenaway
4184700 January 1980 Greenaway
4185891 January 1980 Kaestner
4190855 February 1980 Inoue
4195915 April 1980 Lichty et al.
4205428 June 1980 Ernstoff et al.
4211918 July 1980 Nyfeler et al.
4223050 September 1980 Nyfeler et al.
4225913 September 1980 Bray
4249796 February 1981 Sincerbox et al.
4250217 February 1981 Greenaway
4250393 February 1981 Greenaway
4256787 March 1981 Shaver et al.
4257016 March 1981 Kramer, Jr. et al.
4290672 September 1981 Whitefield
4295145 October 1981 Latta
4311999 January 1982 Upton et al.
4327411 April 1982 Turner
4327966 May 1982 Bloom
4331972 May 1982 Rajchman
4336982 June 1982 Rector, Jr.
4338660 July 1982 Kelley et al.
4343535 August 1982 Bleha, Jr.
4346965 August 1982 Spraque et al.
4348079 September 1982 Johnson
4355463 October 1982 Burns
4361384 November 1982 Bosserman
4369524 January 1983 Rawson et al.
4374397 February 1983 Mir
4389096 June 1983 Hori et al.
4391490 July 1983 Hartk
4396246 August 1983 Holman
4398798 August 1983 Krawczak et al.
4400740 August 1983 Traino et al.
4408884 October 1983 Kleinknecht et al.
4414583 November 1983 Hooker, III
4417386 November 1983 Exner
4418397 November 1983 Brantingham et al.
4420717 December 1983 Wallace et al.
4422099 December 1983 Wolfe
4426768 January 1984 Black et al.
4430584 February 1984 Someshwar et al.
4435041 March 1984 Torok et al.
4440839 April 1984 Mottier
4443819 April 1984 Funada et al.
4443845 April 1984 Hamilton et al.
4447881 May 1984 Brantingham et al.
4454591 June 1984 Lou
4456338 June 1984 Gelbart
4460907 July 1984 Nelson
4462046 July 1984 Spight
4467342 August 1984 Tower
4468725 August 1984 Venturini
4483596 November 1984 Marshall
4484188 November 1984 Ott
4487677 December 1984 Murphy
4492435 January 1985 Banton et al.
4503494 March 1985 Hamilton et al.
4511220 April 1985 Scully
4538883 September 1985 Sprague et al.
4545610 October 1985 Lakritz et al.
4556378 December 1985 Nyfeler et al.
4558171 December 1985 Gantley et al.
4561011 December 1985 Kohara et al.
4561044 December 1985 Ogura et al.
4566935 January 1986 Hornbeck
4567585 January 1986 Gelbart
4571041 February 1986 Gaudyn
4571603 February 1986 Hornbeck et al.
4577932 March 1986 Gelbart
4577933 March 1986 Yip et al.
4588957 May 1986 Balant et al.
4590548 May 1986 Maytum
4594501 June 1986 Culley et al.
4596992 June 1986 Hornbeck
4615595 October 1986 Hornbeck
4623219 November 1986 Trias
4636039 January 1987 Turner
4636866 January 1987 Hattori
4641193 February 1987 Glenn
4645881 February 1987 LeToumelin et al.
4646158 February 1987 Ohno et al.
4649085 March 1987 Landram
4649432 March 1987 Watanabe
4652932 March 1987 Miyajima et al.
4655539 April 1987 Caulfield et al.
4660938 April 1987 Kazan
4661828 April 1987 Miller, Jr. et al.
4662746 May 1987 Hornbeck
4663670 May 1987 Ito et al.
4687326 August 1987 Corby, Jr.
4698602 October 1987 Armitage
4700276 October 1987 Freyman et al.
4707064 November 1987 Dobrowolski et al.
4709995 December 1987 Kuribayashi et al.
4710732 December 1987 Hornbeck
4711526 December 1987 Hennings et al.
4714326 December 1987 Usui et al.
4717066 January 1988 Goldenberg et al.
4719507 January 1988 Bos
4721629 January 1988 Sakai et al.
4722593 February 1988 Shimazaki
4724467 February 1988 Yip et al.
4728185 March 1988 Thomas
4743091 May 1988 Gelbart
4744633 May 1988 Sheiman
4747671 May 1988 Takahashi et al.
4751509 June 1988 Kubota et al.
4761253 August 1988 Antes
4763975 August 1988 Scifres et al.
4765865 August 1988 Gealer et al.
4772094 September 1988 Sheiman
4797694 January 1989 Agostinelli et al.
4797918 January 1989 Lee et al.
4801194 January 1989 Agostinelli et al.
4803560 February 1989 Matsunaga et al.
4804641 February 1989 Arlt et al.
4807021 February 1989 Okumura
4807965 February 1989 Garakani
4809078 February 1989 Yabe et al.
4811082 March 1989 Jacobs et al.
4811210 March 1989 McAulay
4814759 March 1989 Gombrich et al.
4817850 April 1989 Wiener-Avnear et al.
4824200 April 1989 Isono et al.
4827391 May 1989 Sills
4829365 May 1989 Eichenlaub
4836649 June 1989 Ledebuhr et al.
4856863 August 1989 Sampsell et al.
4856869 August 1989 Sakata et al.
4859012 August 1989 Cohn
4859060 August 1989 Katagiri et al.
4866488 September 1989 Frensley
4882683 November 1989 Rupp et al.
4893509 January 1990 MacIver et al.
4896325 January 1990 Coldren
4896948 January 1990 Dono et al.
4897708 January 1990 Clements
4902083 February 1990 Wells
4915463 April 1990 Barbee, Jr.
4915479 April 1990 Clarke
4924413 May 1990 Suwannukul
4926241 May 1990 Carey
4930043 May 1990 Wiegand
4934773 June 1990 Becker
4940309 July 1990 Baum
4943815 July 1990 Aldrich et al.
4945773 August 1990 Sickafus
4949148 August 1990 Bartelink
4950890 August 1990 Gelbart
4952925 August 1990 Haastert
4954789 September 1990 Sampsell
4956619 September 1990 Hornbeck
4961633 October 1990 Ibrahim et al.
4963012 October 1990 Tracy et al.
4970575 November 1990 Soga et al.
4978202 December 1990 Yang
4982184 January 1991 Kirkwood
4982265 January 1991 Watanabe et al.
4984824 January 1991 Antes et al.
4999308 March 1991 Nishiura et al.
5003300 March 1991 Wells
5009473 April 1991 Hunter et al.
5013141 May 1991 Sakata
5018256 May 1991 Hornbeck
5022750 June 1991 Flasck
5023905 June 1991 Wells et al.
5024494 June 1991 Williams et al.
5028939 July 1991 Hornbeck et al.
5031144 July 1991 Persky
5035473 July 1991 Kuwayama et al.
5037173 August 1991 Sampsell et al.
5039628 August 1991 Carey
5040052 August 1991 McDavid
5041395 August 1991 Steffen
5041851 August 1991 Nelson
5043917 August 1991 Okamoto
5048077 September 1991 Wells et al.
5049901 September 1991 Gelbart
5058992 October 1991 Takahashi
5060058 October 1991 Goldenberg et al.
5061049 October 1991 Hornbeck
5066614 November 1991 Dunaway et al.
5068205 November 1991 Baxter et al.
5072239 December 1991 Mitcham et al.
5072418 December 1991 Boutaud et al.
5074947 December 1991 Estes et al.
5075940 December 1991 Kuriyama et al.
5079544 January 1992 DeMond et al.
5081617 January 1992 Gelbart
5083857 January 1992 Hornbeck
5085497 February 1992 Um et al.
5089903 February 1992 Kuwayama et al.
5093281 March 1992 Eshima
5096279 March 1992 Hornbeck et al.
5099353 March 1992 Hornbeck
5101184 March 1992 Antes
5101236 March 1992 Nelson et al.
5103334 April 1992 Swanberg
5105207 April 1992 Nelson
5105299 April 1992 Anderson et al.
5105369 April 1992 Nelson
5107372 April 1992 Gelbart et al.
5112436 May 1992 Bol
5113272 May 1992 Reamey
5113285 May 1992 Franklin et al.
5115344 May 1992 Jaskie
5119204 June 1992 Hashimoto et al.
5121343 June 1992 Faris
5126812 June 1992 Greiff
5126826 June 1992 Kauchi et al.
5126836 June 1992 Um
5128660 July 1992 DeMond et al.
5129716 July 1992 Holakovszky et al.
5132723 July 1992 Gelbart
5132812 July 1992 Takahashi et al.
5136695 August 1992 Goldshlag et al.
5137836 August 1992 Lam
5142303 August 1992 Nelson
5142405 August 1992 Hornbeck
5142677 August 1992 Ehlig et al.
5144472 September 1992 Sang, Jr. et al.
5147815 September 1992 Casto
5148157 September 1992 Florence
5148506 September 1992 McDonald
5149405 September 1992 Bruns et al.
5150205 September 1992 Um et al.
5151718 September 1992 Nelson
5151724 September 1992 Kikinis
5151763 September 1992 Marek et al.
5153770 October 1992 Harris
5155604 October 1992 Miekka et al.
5155615 October 1992 Tagawa et al.
5155778 October 1992 Magel et al.
5155812 October 1992 Ehlig et al.
5157304 October 1992 Kane et al.
5159485 October 1992 Nelson
5161042 November 1992 Hamada
5162787 November 1992 Thompson et al.
5164019 November 1992 Sinton
5165013 November 1992 Faris
5168401 December 1992 Endriz
5168406 December 1992 Nelson
5170156 December 1992 DeMond et al.
5170269 December 1992 Lin et al.
5170283 December 1992 O'Brien et al.
5172161 December 1992 Nelson
5172262 December 1992 Hornbeck
5177724 January 1993 Gelbart
5178728 January 1993 Boysel et al.
5179274 January 1993 Sampsell
5179367 January 1993 Shimizu
5181231 January 1993 Parikh et al.
5182665 January 1993 O'Callaghan et al.
5185660 February 1993 Um
5185823 February 1993 Kaku et al.
5188280 February 1993 Nakao et al.
5189404 February 1993 Masimo et al.
5189505 February 1993 Bartelink
5191405 March 1993 Tomita et al.
5192864 March 1993 McEwen et al.
5192946 March 1993 Thompson et al.
5198895 March 1993 Vick
D334557 April 1993 Hunter et al.
D334742 April 1993 Hunter et al.
5202785 April 1993 Nelson
5206629 April 1993 DeMond et al.
5206829 April 1993 Thakoor et al.
5208818 May 1993 Gelbart et al.
5208891 May 1993 Prysner
5210637 May 1993 Puzey
5212115 May 1993 Cho et al.
5212555 May 1993 Stoltz
5212582 May 1993 Nelson
5214308 May 1993 Nishiquchi et al.
5214419 May 1993 DeMond et al.
5214420 May 1993 Thompson et al.
5216278 June 1993 Lin et al.
5216537 June 1993 Hornbeck
5216544 June 1993 Horikawa et al.
5219794 June 1993 Satoh et al.
5220200 June 1993 Blanton
5221400 June 1993 Staller et al.
5221982 June 1993 Faris
5224088 June 1993 Atiya
D337320 July 1993 Hunter et al.
5226099 July 1993 Mignardi et al.
5227910 July 1993 Khattak
5229597 July 1993 Fukatsu
5230005 July 1993 Rubino et al.
5231363 July 1993 Sano et al.
5231388 July 1993 Stoltz
5231432 July 1993 Glenn
5233456 August 1993 Nelson
5233460 August 1993 Partlo et al.
5233874 August 1993 Putty et al.
5237340 August 1993 Nelson
5237435 August 1993 Kurematsu et al.
5239448 August 1993 Perkins et al.
5239806 August 1993 Maslakow
5240818 August 1993 Mignardi et al.
5245686 September 1993 Faris et al.
5247180 September 1993 Mitcham et al.
5247593 September 1993 Lin et al.
5249245 September 1993 Lebby et al.
5251057 October 1993 Guerin et al.
5251058 October 1993 MacArthur
5254980 October 1993 Hendrix et al.
5255100 October 1993 Urbanus
5256869 October 1993 Lin et al.
5258325 November 1993 Spitzer et al.
5260718 November 1993 Rommelmann et al.
5260798 November 1993 Um et al.
5262000 November 1993 Welbourn et al.
5272473 December 1993 Thompson et al.
5278652 January 1994 Urbanus et al.
5278925 January 1994 Boysel et al.
5280277 January 1994 Hornbeck
5281887 January 1994 Engle
5281957 January 1994 Schoolman
5285105 February 1994 Cain
5285196 February 1994 Gale, Jr.
5285407 February 1994 Gale et al.
5287096 February 1994 Thompson et al.
5287215 February 1994 Warde et al.
5289172 February 1994 Gale, Jr. et al.
5291317 March 1994 Newswanger
5291473 March 1994 Pauli
5293511 March 1994 Poradish et al.
5296408 March 1994 Wilbarg et al.
5296891 March 1994 Vogt et al.
5296950 March 1994 Lin et al.
5298460 March 1994 Nishiguchi et al.
5299037 March 1994 Sakata
5299289 March 1994 Omae et al.
5300813 April 1994 Joshi et al.
5301062 April 1994 Takahashi et al.
5303043 April 1994 Glenn
5303055 April 1994 Hendrix et al.
5307056 April 1994 Urbanus
5307185 April 1994 Jones et al.
5310624 May 1994 Ehrlich
5311349 May 1994 Anderson et al.
5311360 May 1994 Bloom et al.
5312513 May 1994 Florence et al.
5313479 May 1994 Florence
5313648 May 1994 Ehlig et al.
5313835 May 1994 Dunn
5315418 May 1994 Sprague et al.
5315423 May 1994 Hong
5315429 May 1994 Abramov
5319214 June 1994 Gregory et al.
5319668 June 1994 Luecke
5319789 June 1994 Ehlig et al.
5319792 June 1994 Ehlig et al.
5320709 June 1994 Bowden et al.
5321416 June 1994 Bassett et al.
5323002 June 1994 Sampsell et al.
5323051 June 1994 Adams et al.
5325116 June 1994 Sampsell
5327286 July 1994 Sampsell et al.
5329289 July 1994 Sakamoto et al.
5330301 July 1994 Brancher
5330878 July 1994 Nelson
5331454 July 1994 Hornbeck
5334991 August 1994 Wells et al.
5339116 August 1994 Urbanus et al.
5339177 August 1994 Jenkins et al.
5340772 August 1994 Rosotker
5345521 September 1994 McDonald et al.
5347321 September 1994 Gove
5347378 September 1994 Handschy et al.
5347433 September 1994 Sedlmayr
5348619 September 1994 Bohannon et al.
5349687 September 1994 Ehlig et al.
5351052 September 1994 D'Hont et al.
5352926 October 1994 Andrews
5354416 October 1994 Okudaira
5357369 October 1994 Pilling et al.
5357803 October 1994 Lane
5359349 October 1994 Jambor et al.
5359451 October 1994 Gelbart et al.
5361131 November 1994 Tekemori et al.
5363220 November 1994 Kuwayama et al.
5365283 November 1994 Doherty et al.
5367585 November 1994 Ghezzo et al.
5370742 December 1994 Mitchell et al.
5371543 December 1994 Anderson
5371618 December 1994 Tai et al.
5377705 January 1995 Smith, Jr. et al.
5382961 January 1995 Gale, Jr.
5387924 February 1995 Gale, Jr. et al.
5389182 February 1995 Mignardi
5391881 February 1995 Jeuch et al.
5392140 February 1995 Ezra et al.
5392151 February 1995 Nelson
5394303 February 1995 Yamaji
5398071 March 1995 Gove et al.
5399898 March 1995 Rostoker
5404365 April 1995 Hiiro
5404485 April 1995 Ban
5408123 April 1995 Murai
5410315 April 1995 Huber
5411769 May 1995 Hornbeck
5412186 May 1995 Gale
5412501 May 1995 Fisli
5418584 May 1995 Larson
5420655 May 1995 Shimizu
5420722 May 1995 Bielak
5426072 June 1995 Finnila
5427975 June 1995 Sparks et al.
5430524 July 1995 Nelson
5435876 July 1995 Alfaro et al.
5438477 August 1995 Pasch
5439731 August 1995 Li et al.
5442411 August 1995 Urbanus et al.
5442414 August 1995 Janssen et al.
5444566 August 1995 Gale et al.
5445559 August 1995 Gale et al.
5446479 August 1995 Thompson et al.
5447600 September 1995 Webb
5448314 September 1995 Heimbuch et al.
5448546 September 1995 Pauli
5450088 September 1995 Meier et al.
5450219 September 1995 Gold et al.
5451103 September 1995 Hatanaka et al.
5452024 September 1995 Sampsell
5452138 September 1995 Mignardi et al.
5453747 September 1995 D'Hont et al.
5453778 September 1995 Pettitt et al.
5453803 September 1995 Shapiro et al.
5454160 October 1995 Nickel
5454906 October 1995 Baker et al.
5455445 October 1995 Kurtz et al.
5455455 October 1995 Badehi
5455602 October 1995 Tew
5457493 October 1995 Leddy et al.
5457566 October 1995 Sampsell et al.
5457567 October 1995 Shinohara
5458716 October 1995 Alfaro et al.
5459492 October 1995 Venkateswar
5459528 October 1995 Pettitt
5459592 October 1995 Shibatani et al.
5459610 October 1995 Bloom et al.
5461197 October 1995 Hiruta et al.
5461410 October 1995 Venkateswar et al.
5461411 October 1995 Florence et al.
5461547 October 1995 Ciupke et al.
5463347 October 1995 Jones et al.
5463497 October 1995 Muraki et al.
5465175 November 1995 Woodgate et al.
5467106 November 1995 Salomon
5467138 November 1995 Gove
5467146 November 1995 Huang et al.
5469302 November 1995 Lim
5471341 November 1995 Warde et al.
5473512 December 1995 Degani et al.
5475236 December 1995 Yoshizaki
5480839 January 1996 Ezawa et al.
5481118 January 1996 Tew
5481133 January 1996 Hsu
5482564 January 1996 Douglas et al.
5482818 January 1996 Nelson
5483307 January 1996 Anderson
5485172 January 1996 Sawachika et al.
5485304 January 1996 Kaeriyama
5485354 January 1996 Ciupke et al.
5486698 January 1996 Hanson et al.
5486841 January 1996 Hara et al.
5486946 January 1996 Jachimowicz et al.
5488431 January 1996 Gove et al.
5489952 February 1996 Gove et al.
5490009 February 1996 Venkateswar et al.
5491510 February 1996 Gove
5491612 February 1996 Nicewarner, Jr.
5491715 February 1996 Flaxl
5493177 February 1996 Muller et al.
5493439 February 1996 Engle
5497172 March 1996 Doherty et al.
5497197 March 1996 Gove et al.
5497262 March 1996 Kaeriyama
5499060 March 1996 Gove et al.
5499062 March 1996 Urbanus
5500761 March 1996 Goossen et al.
5502481 March 1996 Dentinger et al.
5504504 April 1996 Markandey et al.
5504514 April 1996 Nelson
5504575 April 1996 Stafford
5504614 April 1996 Webb et al.
5506171 April 1996 Leonard et al.
5506597 April 1996 Thompson et al.
5506720 April 1996 Yoon
5508558 April 1996 Robinette, Jr. et al.
5508561 April 1996 Tago et al.
5508565 April 1996 Hatakeyama et al.
5508750 April 1996 Hewlett et al.
5508840 April 1996 Vogel et al.
5508841 April 1996 Lin et al.
5510758 April 1996 Fujita et al.
5510824 April 1996 Nelson
5512374 April 1996 Wallace et al.
5512748 April 1996 Hanson
5515076 May 1996 Thompson et al.
5516125 May 1996 McKenna
5517340 May 1996 Doany et al.
5517347 May 1996 Sampsell
5517357 May 1996 Shibayama
5517359 May 1996 Gelbart
5519251 May 1996 Sato et al.
5519450 May 1996 Urbanus et al.
5521748 May 1996 Sarraf
5523619 June 1996 McAllister et al.
5523628 June 1996 Williams et al.
5523803 June 1996 Urbanus et al.
5523878 June 1996 Wallace et al.
5523881 June 1996 Florence et al.
5523920 June 1996 Machuga et al.
5524155 June 1996 Weaver
5526834 June 1996 Mielnik et al.
5534107 July 1996 Gray et al.
5534883 July 1996 Koh
5539422 July 1996 Heacock et al.
5544306 August 1996 Deering et al.
5552635 September 1996 Kim et al.
5554304 September 1996 Suzuki
5576878 November 1996 Henck
5602671 February 1997 Hornbeck
5606181 February 1997 Sakuma et al.
5606447 February 1997 Asada et al.
5610438 March 1997 Wallace et al.
5623361 April 1997 Engle
5629566 May 1997 Doi et al.
5629801 May 1997 Staker et al.
5640216 June 1997 Hasegawa et al.
5658698 August 1997 Yagi et al.
5661592 August 1997 Bornstein et al.
5661593 August 1997 Engle
5663817 September 1997 Frapin et al.
5668611 September 1997 Ernstoff et al.
5673139 September 1997 Johnson
5677783 October 1997 Bloom et al.
5689361 November 1997 Damen et al.
5691836 November 1997 Clark
5694740 December 1997 Martin et al.
5696560 December 1997 Songer
5699740 December 1997 Gelbart
5704700 January 1998 Kappel et al.
5707160 January 1998 Bowen
5712649 January 1998 Tosaki
5713652 February 1998 Zavracky et al.
5726480 March 1998 Pister
5731802 March 1998 Aras et al.
5734224 March 1998 Tagawa et al.
5742373 April 1998 Alvelda
5744752 April 1998 McHerron et al.
5745271 April 1998 Ford et al.
5757354 May 1998 Kawamura
5757536 May 1998 Ricco et al.
5764280 June 1998 Bloom et al.
5768009 June 1998 Little
5770473 June 1998 Hall et al.
5793519 August 1998 Furlani et al.
5798743 August 1998 Bloom
5798805 August 1998 Ooi et al.
5801074 September 1998 Kim et al.
5802222 September 1998 Rasch et al.
5808323 September 1998 Spaeth et al.
5808797 September 1998 Bloom et al.
5815126 September 1998 Fan et al.
5825443 October 1998 Kawasaki et al.
5832148 November 1998