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United States Utility Patents
7,053,980 - 7,053,989
Previous 10 Next 10
| Number | | Title |
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7,053,980 |
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Lithographic alignment system |
|
7,053,981 |
|
Lithographic apparatus and device manufacturing method |
|
7,053,982 |
|
Alignment apparatus and exposure apparatus |
|
7,053,983 |
|
Liquid immersion type exposure apparatus |
|
7,053,984 |
|
Method and systems for improving focus accuracy in a lithography system |
|
7,053,985 |
|
Printer and a method for recording a multi-level image |
|
7,053,986 |
|
Projection optical system, exposure apparatus, and device manufacturing method |
|
7,053,987 |
|
Methods and systems for controlling radiation beam characteristics for microlithographic processing |
|
7,053,988 |
|
Optically polarizing retardation arrangement, and microlithography projection exposure machine |
|
7,053,989 |
|
Exposure apparatus and exposure method |
For U.S. patent law, rules, and procedures see MPEP.
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