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United States Utility Patents
5,324,680 - 5,324,689

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NumberTitle
5,324,680 Semiconductor memory device and the fabrication method thereof
5,324,681 Method of making a 3-dimensional programmable antifuse for integrated circuits
5,324,682 Method of making an integrated circuit capable of low-noise and high-power microwave operation
5,324,683 Method of forming a semiconductor structure having an air region
5,324,684 Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure
5,324,685 Method for fabricating a multilayer epitaxial structure
5,324,686 Method of manufacturing semiconductor device using hydrogen as a diffusion controlling substance
5,324,687 Method for thinning of integrated circuit chips for lightweight packaged electronic systems
5,324,688 Method of fabricating a semiconductor acceleration sensor
5,324,689 Critical dimension control with a planarized underlayer



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