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United States Patent 3,524,776
Issue Date: August 18, 1970

Current U.S. Class: 438/550 ; 118/725; 118/900; 148/DIG.162; 148/DIG.6; 148/DIG.71; 427/251; 438/565; 438/909
Current International Class: C30B 31/12 (20060101); C30B 31/00 (20060101); H01L 21/00 (20060101)


For U.S. patent law, rules, and procedures see MPEP.

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